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"ABSTRAKMaskless photolithography menggunakan proyektor DLP merupakanproses yang mudah dan sederhana, namun durasi pemaparan jika hanyamenggunakan cahaya tampak memakan waktu cukup lama. Inovasi yang diajukanadalah pencahayaan hibrida antara sinar tampak dan sinar UV, dengan tujuanmempersingkat durasi pemaparan. Dalam penelitian ini akan dibahas tentangpengaruh pemaparan secara hibrida, yaitu penambahan cahaya UV pada pemaparandengan DLP, terhadap waktu yang dibutuhkan untuk proses pemaparan. ProyektorDLP memiliki sebuah chip DMD yang fungsinya memantulkan cahaya secara pixel,maka DLP dapat digunakan sebagai alat maskless photolithography. Jikagelombang cahaya semakin kecil, maka frekuensi semakin besar, sedangkan energiberbanding lurus dengan frekuensi. Maka itu dibutuhkan gelombang cahaya yangkecil, agar intensitas yang masuk lebih banyak dan mempersingkat waktu.Pemaparan hibrida dilakukan dengan menggabungan cahaya sinar UV dari luarproyektor DLP. Dalam penelitian ini didapatkan rasio antara sumber hibrida dantotal durasi pemaparan sebesar 1:15. Hasil yang didapat dengan metode tersebutdapat mempercepat proses pemaparan sekitar 60%, dibandingkan dengan cahayatampak saja.

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ABSTRACTMaskless Photolithography using DLP projector is simple and easy, butwith only visible light as its source, the exposure process takes quite some time.This research purposed hybrid lighting from visible light and UV light with the aimof shortening the exposure time. This research will explain about how the DLPworks to provide maskless photolithography and the effect of UV light addition tothe exposure time. DLP projector has a chip, called DMD, to reflect light from thesource in pixel form, therefore, DLP can be used for maskless photolithography.The shorter the wavelength of light, the higher the frequence of that light, andenergy is directly proportional to frequency. Thats why maskless photolithographyneeds light with short wavelength. This hybrid light system has been done withcombining two light sources which are visible light in the DLP projector and addingUV light from the outside. This hybrid exposure. In this research, the ratio betweenhybrid lighting and total exposure time is 1:15. The result that we get from thismethod saves around 60% of time that was consumed with visible light exposure."

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