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Masruroh
Plasma power effect on the surfaces of a quartz crystal during etching using tetrafluoroethane gas
" The performance of a quartz crystal microbalance (QCM) biosensor can be enhanced by patterning the surface of the SiO2 substrate. In this study, the patterning was realized by a plasma etching process. The etching of the SiO2 was carried out using a tetrafluoroethane (CH2FCF3) plasma. The plasma was generated by applying power from a generator. The generator used in this research was a low frequency 40 kHz plasma generator. The generator was equipped with automatic ... "
Depok: Faculty of Engineering, Universitas Indonesia, 2017
UI-IJTECH 8:8 (2017)
Artikel Jurnal  Universitas Indonesia Library