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This handbook volume aims to provide a comprehensive, self-contained, and authoritative reference in MEMS. It covers the theoretical and practical aspects including but not limited to sensors, actuators, RF MEMS, micro fluids and bio MEMS systems. It is particularly recommended to undergraduates, postgraduates, researchers, scientists, and field experts. This comprehensive summary will provide a solid knowledge background and inspire innovations in this highly interdisciplinary field.
The handbook series consists of 5 volumes: Micro/nano fabrication technology, MEMS, ...
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Singapore: Springer Singapore, 2019
e20509544
eBooks Universitas Indonesia Library
