Ditemukan 1 dokumen yang sesuai dengan query
Iwan Sugihartono
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[ABSTRAK
ZnO thin films have been deposited on top of Si substrate by ultrasonic spray pyrolisis (USP) at various growth temperatures. The structure analysis by X-ray diffraction shows that ZnO thin films has polycrystalline structure. The scanning electron microscopy (SEM) confirmed that the films thicknes are not homogenous. The atomic force microscopy (AFM) analysis shows the root means square (RMS) roughness of unannealed and atmosphere annealed (800oC) are 36.543 nm and 24.754 nm, respectively. According to ...
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Depok: Universitas Indonesia, 2014
D2150
UI - Disertasi Membership Universitas Indonesia Library